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Paper Publications

Current position: Home  >  Scientific Research  >  Paper Publications

Pattern Optimization for Phyllotactic Fixed Abrasive Pads Based on the Trajectory Method

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Journal:IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Place of Publication:2016JCR大类-工程技术4区

Note:科技处汇总序号：304 2018年考核

Translation or Not:no

First Author:HZW,赵再兴(学),FCF