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Paper Publications

Current position: Home  >  Scientific Research  >  Paper Publications

Influence of fixed abrasive configuration on the polishing process of silicon wafers

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Affiliation of Author(s):机电及自动化学院

Journal:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Indexed by:Journal paper

Translation or Not:no

First Author:FCF

Correspondence Author:赵再兴,卢龙远,林燕芬