Removal mechanism of sapphire substrates (0001, 1120 and 1010) in mechanical planarization machining
Release time:2018-11-29 Hits:
Journal:CERAMICS INTERNATIONAL
Place of Publication:2016JCR大类-工程技术2区
Note:2018年考核
Translation or Not:no
Date of Publication:2016-11-02
First Author:JF,XXP,LJ
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