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陆静

教授

博士生导师

学位：工学博士学位
所在单位：制造工程研究院
主要任职：厦门市光电材料加工重点实验室副主任
学历：博士研究生
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其他任职：国际磨粒加工委员会（ICAT）青年委员，中国机械工程学会生产工程分会光整加工专业委员会理事，稀土抛光材料与界表面调控加工技术专业委员会副主任委员，福建省机械工程学会标准委员会委员

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科研项目

多片单晶/多晶金刚石晶圆磨抛加工设备开发,陆静,2023/07/30-2023/05/31
单晶金刚石衬底的磨粒诱导反应抛光技术及应用研究,陆静,2021/09/30-
金刚石功能衬底加工技术高价值专利培育,国际合作项目,陆静,2020/03/31-
金属磨粒多孔陶瓷砂轮反应磨削单晶金刚石衬底的基础研究,陆静,2019/08/17-
石材翻新的磨抛工具设计与评测,陆静,2020/12/25-2021/11/01
硬核软壳纳米复合磨粒的半固结柔性加工技术基础研究,国家自然科学基金项目,陆静,2014/08/18-2018/12/31
大尺寸CVD单晶/多晶金刚石精密加工技术研究,陆静,2019/10/25-2021/12/31

获奖信息

第十三届福建省自然科学优秀学术论文奖,2018

论文成果

Structure and characteristics of Si-coated diamond grits.Diamond abrasives Engineering,
Ti coating of nanocrystalline diamond by atomic layer deposition.ADVANCES IN GRINDING AND ABRASIVE TECHNOLOGY XIII,
Silicon atomic layer deposition on nanocrystalline diamond.ADVANCES IN MACHINING & MANUFACTURING TECHNOLOGY VIII,
Microstructure and thermal characteristic of Si-coated multi-walled carbon nanotubes.NANOTECHNOLOGY,
Characterization of silicon films grown by atomic layer deposition on nanocrystalline diamond.DIAMOND AND RELATED MATERIALS,
Electrochemical properties of nanodiamond powder electrodes.DIAMOND AND RELATED MATERIALS,
Protective silicon coating for nanodiamonds using atomic layer deposition.APPLIED SURFACE SCIENCE,
Synthesis and Characterization of Core-Shell Structural MWNT-Zirconia Nanocomposites.NANO LETTERS,
Wettability and reactivity in diamond-borosilicate glass system.INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS,
Synthesis and electrochemical properties of TiO2/nanodiamond nanocomposite.DIAMOND AND RELATED MATERIALS,
Fabrication of core-shell structured MWCNT-Ti(TiC) using a one-pot reaction from a mixture of TiCl3, TiH2, and MWCNTs.CARBON,
The double-side lapping of SiC wafers with semifixed abrasives and resin-combined plates.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,
Study on Raman Spectroscopy and Purification of B-C-N Compound.METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE,
Study on Electronic Properties of Single-Walled B3C10N3 Nanotubes by First Principle Calculations.INTEGRATED FERROELECTRICS,
DFT Studies on the Adsorption Behavior and Electronic Properties of Zr/Ti on Single-walled Carbon Nanotubes.INTEGRATED FERROELECTRICS,
Oxidized carbon/nano-SiC supported platinum nanoparticles as highly stable electrocatalyst for oxygen reduction reaction.INTERNATIONAL JOURNAL OF HYDROGEN ENERGY,
Promoting oxidation-resistance property of SiC particles by adding Ti powder into SiC-brosilicate glass composites.MATERIALS LETTERS,
Core-shell structural nanodiamond@TiN supported Pt nanoparticles as a highly efficient and stable electrocatalyst for direct methanol fuel cells.ELECTROCHIMICA ACTA,
Fabrication of diamond-SiC-TiC composite by a spark plasma sintering-reactive synthesis method.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,
Preparing porous diamond composites via electrophoretic deposition of diamond particles on foam nickel substrate.MATERIALS LETTERS,
Nano Titania Modified Nanodiamonds as Stable Electrocatalyst Supports for Direct Methanol Fuel Cells.JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
Avoiding the oxidation of SiC in SiC-borosilicate glass composites by adding zinc.CORROSION SCIENCE,
The effects of abrasive yielding on the polishing of SiC wafers using a semi-fixed flexible pad.PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE,
Fabrication of bulk nano-SiC via in-situ reaction of core-shell structural SiC@C with Si using high pressure high temperature sintering method.MATERIALS LETTERS,
A novel support of nano titania modified graphitized nanodiamond for Pt electrocatalyst in direct methanol fuel cell.INTERNATIONAL JOURNAL OF HYDROGEN ENERGY,
Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,
Inhibiting the oxidation of diamond during preparing the vitrified dental grinding tools by depositing a ZnO coating using direct urea precipitation method.MATERIALS SCIENCE & ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS,
Effect of Gradient TiC-Ti5Si3-TiSi2 barrier layer on SiC in SiC-borosilicate glass composites.SURFACE & COATINGS TECHNOLOGY,
Nanodiamond/nitrogen-doped graphene (core/shell) as an effective and stable metal-free electrocatalyst for oxygen reduction reaction.ELECTROCHIMICA ACTA,
Reactive sintering cBN-Ti-Al composites by spark plasma sintering.DIAMOND AND RELATED MATERIALS,
Preparation and Characterization of Zirconia-Coated Nanodiamonds as a Pt Catalyst Support for Methanol Electro-Oxidation.NANOMATERIALS,
Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing.APPLIED SURFACE SCIENCE,
A hybrid of NiMo-Mo2C/C as non-noble metal electrocatalyst for hydrogen evolution reaction in an acidic solution.ELECTROCHIMICA ACTA,
Preparation of the gradient Mo layers on diamond grits by spark plasma sintering and their effect on Fe-based matrix diamond composites.JOURNAL OF ALLOYS AND COMPOUNDS,
Spark plasma coating of tungsten-coated SiC particles.POWDER TECHNOLOGY,
Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO2-coated diamond abrasive.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
Study of Ti-coated diamond grits prepared by spark plasma coating.DIAMOND AND RELATED MATERIALS,
Investigation of Ti coatings on cubic boron nitride (cBN) grits by discharge treatment in spark plasma sintering system.ADVANCED POWDER TECHNOLOGY,
High-efficiency grinding CVD diamond films by Fe-Ce containing corundum grinding wheels.DIAMOND AND RELATED MATERIALS,
Removal mechanism of sapphire substrates (0001, 1120 and 1010) in mechanical planarization machining.CERAMICS INTERNATIONAL,
Comparison study of Fe-based matrix composites reinforced with Ti-coated and Mo-coated SiC particles.MATERIALS CHEMISTRY AND PHYSICS,
Rapid grinding CVD diamond films using corundum grinding wheels containing iron.INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS,
Surface damage of single-crystal diamond (100) processed based on a sol-gel polishing tool.DIAMOND AND RELATED MATERIALS,
An efficient titanium-containing corundum wheel for grinding CVD diamond films.DIAMOND AND RELATED MATERIALS,
Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP.INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE,
Fabrication of fixed polishing tool by knitting diamond/CNT fiber threads on cloth.DIAMOND AND RELATED MATERIALS,
Surface conversion reaction and high efficient grinding of CVD diamond films by chemically mechanical polishing.CERAMICS INTERNATIONAL,
Removal mechanism of 4H-and 6H-SiC substrates (0001 and 0001 over bar ) in mechanical planarization machining.PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE,
Uniform dispersion of nano-Al2O3 particles in the 3D graphene network of ternary nanocomposites.CERAMICS INTERNATIONAL,
Pollution-Free Approaches for Highly Efficient Sapphire Substrate Processing by Mechanical Chemical Polishing.CATALYSTS,
Precision Polishing of Single Crystal Diamond (111) Substrates Using a Sol-Gel (SG) Polishing Pad.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,
Study on the surface quality of marble tiles polished with Sol-Gel derived pads.JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY,
Fabrication and microstructural characterization of the diamond@amorphous carbon nanocomposite core/shell structure via in-situ polymerization.CERAMICS INTERNATIONAL,
Synthesis of nanodiamond-SnO2 core-shell nanocomposite and its application for nitrite electrooxidation.FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES,
Removal mechanism of sapphire substrates (0001, 11(2)over-bar0 and 10(1)over-bar0) in mechanical planarization machining (vol 43, pg 16178, 2017).CERAMICS INTERNATIONAL,
Study on nanomechanical properties of 4H-SiC and 6H-SiC by molecular dynamics simulations.CERAMICS INTERNATIONAL,
Model-free determination of the birefringence and dichroism in c-cut crystals from transmission ellipsometry measurements.APPLIED OPTICS,
Prediction of pop-in load for sapphires with different crystal orientations.CERAMICS INTERNATIONAL,
Reactive Infiltration and Microstructural Characteristics of Sn-V Active Solder Alloys on Porous Graphite.MATERIALS,
Removal Characteristics of Sapphire Lapping using Composite Plates with Consciously Patterned Resinoid-Bonded Semifixed Diamond Grits.CRYSTALS,
Improvement of ablation capacity of sapphire by gold film-assisted femtosecond laser processing.OPTICS AND LASERS IN ENGINEERING,
Focused Ion Beam Milling of Single-Crystal Sapphire with A-, C-, and M-Orientations.MATERIALS,
Study on the enhancement of sol-gel properties by binary compounding technology for dry polishing hard and brittle materials.JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY,
Fabrication of a sol-gel polishing tool for green manufacturing of the seal stone.JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY,
Characterisation of diamond abrasive grains of grinding tools using industrial X-ray computed tomography.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,
Double-sided and single-sided polished 6H-SiC wafers with subsurface damage layer studied by Mueller matrix ellipsometry.JOURNAL OF APPLIED PHYSICS,
Deformation anisotropy of nano-scratching on C-plane of sapphire: A molecular dynamics study and experiment.APPLIED SURFACE SCIENCE,
Molecular dynamics simulation of nanoindentation on c-plane sapphire.MECHANICS OF MATERIALS,
Towards understanding the brittle-ductile transition in the extreme manufacturing.INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING,
Low-Destructive Processing of Single Crystal Aluminum Nitride Based on Sol-Gel Polishing Tool.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,
Controllable material removal behavior of 6H-SiC wafer in nanoscale polishing.APPLIED SURFACE SCIENCE,
Enhanced Microsphere-Assisted Picosecond Laser Processing for Nanohole Fabrication on Silicon via Thin Gold Coating.MICROMACHINES,
Characteristics and Mechanism of CVD Single Crystal Diamond Processed by Picosecond Laser.ACTA PHOTONICA SINICA,
Short-pulse Laser-induced Plasma Micro-etching of High-temperature and High Pressure Single Crystal Diamond.ACTA PHOTONICA SINICA,
Ablation characteristics and material removal mechanisms of a single-crystal diamond processed by nanosecond or picosecond lasers.OPTICS EXPRESS,
Exploring the activation energy of diamond reacting with metals and metal oxides by first-principle calculation.DIAMOND AND RELATED MATERIALS,
Review on laser-induced etching processing technology for transparent hard and brittle materials.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,
Fabrication of porous structure vitrified bond diamond grinding wheel via direct ink writing.CERAMICS INTERNATIONAL,
Mueller Matrix Ellipsometric Characterization of Nanoscale Subsurface Damage of 4H-SiC Wafers: From Grinding to CMP.FRONTIERS IN PHYSICS,
Sol-gel polishing technology for extremely hard semiconductor substrates.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,
Study on ultraviolet laser processing of a single-crystal diamond along (100) and (110) crystal orientations.OPTICS AND LASER TECHNOLOGY,
Anisotropy of material removal during laser-induced plasma assisted ablation of sapphire.CERAMICS INTERNATIONAL,
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed.
Crystal orientation-dependent scribing of A-, C-, and M-plane sapphires by an ultraviolet laser.
Understanding the Mechanisms of SiC-Water Reaction during Nanoscale Scratching without Chemical Reagents.
Mechanical chemical polishing of large-size single-crystal diamond substrates with a sol-gel polishing tool.
Fabrication and application of CNT fiber-ultra-fine diamond composites via electrophoretic deposition and instantaneous Joule-heating method.
Study of grinding and polishing tools in automated processing of curved stone.
Research on Parameters Optimization of Diamond Microgrooves Processed by Ultravilot Nanosecond Laser.
Fabrication and application of Fe2O3-decorated carbon nanotube fibers via instantaneous Joule-heating method.
Research on the Drag Polishing of Irregular Seals Based on the Self-Developed Sol-Gel Ball Tools.
Chemical reaction on silicon carbide wafer (0 0 0 1 and 0 0 0-1) with water molecules in nanoscale polishing.
Study on picosecond laser stealth dicing of 4H-SiC along [1120] and [1100] crystal orientations on Si-face and C-face.
Mechanochemical grinding diamond film using titanium-coated diamond active abrasives prepared by vacuum micro-evaporation coating.
Efficient grinding diamond film using chromium-coated diamond grinding wheel based on mechanochemical effect.
Rapid grinding diamond film using a grinding wheel containing nickel-plated diamond abrasives based on mechanochemical effect.
Tribochemical mechanisms of abrasives for SiC and sapphire substrates in nanoscale polishing.
Effects of processing parameters and grinding direction on the material removal mechanism of (100) surface single crystal diamond in self-rotating mechanical grinding.
Energy beam-based direct and assisted polishing techniques for diamond: A review.
Research on gold film-assisted ultraviolet nanosecond laser machining of diamond microgrooves.

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