陆静

( Professor)

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Paper Publications

Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

Release time:2023-04-04 Hits:
Affiliation of Author(s):制造工程研究院 Journal:APPLIED SURFACE SCIENCE Indexed by:Journal paper Translation or Not:no Date of Publication:2016-12-01 First Author:许永超 Correspondence Author:LJ,XXP

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