陆静

( Professor)

+

Paper Publications

Study on picosecond laser stealth dicing of 4H-SiC along [1120] and [1100] crystal orientations on Si-face and C-face

Release time:2024-04-11 Hits:
Translation or Not:no

Pre One:Chemical reaction on silicon carbide wafer (0 0 0 1 and 0 0 0-1) with water molecules in nanoscale polishing

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