Doctoral Degree in Engineering

博士研究生

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Professor Supervisor of Doctorate Candidates

  • Academic Titles:厦门市光电材料加工重点实验室副主任
  • Education Level:博士研究生
  • Degree:Doctoral Degree in Engineering
  • School/Department:制造工程研究院
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  • Other Post:国际磨粒加工委员会（ICAT）青年委员，中国机械工程学会生产工程分会光整加工专业委员会理事，稀土抛光材料与界表面调控加工技术专业委员会副主任委员，福建省机械工程学会标准委员会委员

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    Home > Scientific Research > Paper Publications

    Precision Polishing of Single Crystal Diamond (111) Substrates Using a Sol-Gel (SG) Polishing Pad

    Release time:2024-04-11 Hits:

    Journal:IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
     Translation or Not:no

    Pre One:Pollution-Free Approaches for Highly Efficient Sapphire Substrate Processing by Mechanical Chemical Polishing

    Next One:Study on the surface quality of marble tiles polished with Sol-Gel derived pads

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