+Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed
Release time:2023-05-31 Hits:
Affiliation of Author(s):制造工程研究院
Journal:IEEE Transactions on Semiconductor Manufacturing
Funded by:国家自然科学基金项目
Indexed by:Journal paper
Translation or Not:no
Date of Publication:2022-05-31
First Author:LJ