+Study on Polishing of Polycrystalline AlN Using Sol-Gel Polishing Tool
Release time:2023-05-31 Hits:
Affiliation of Author(s):制造工程研究院
Journal:IEEE Transactions on Semiconductor Manufacturing
Funded by:国家自然科学基金项目
Indexed by:Journal paper
Translation or Not:no
Date of Publication:2022-11-30
First Author:LJ
Correspondence Author:吕小斌