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【一作-SCI】A comparative study on the material removal mechanisms of 6H-SiC polished by semi-fixed and fixed diamond abrasive tools

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Journal:Wear

Translation or Not:no

Date of Publication:2016-06-01

Pre One:【一作-SCI】Study on the processing characteristics of SiC and sapphire substrates polished by semi-fixed and fixed abrasive tools
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