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罗求发

Personal Information

Associate professor
Supervisor of Master's Candidates

Scientific Research

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Paper Publications

【一作SCI-二区top】Study on tribochemical reaction behavior induced by abrasives scratching in SiC wafer backside thinning.Wear.2026:206589
【一作SCI】Study on electrochemical mechanical polishing of Silicon Carbide substrates with controllable material removal behavior.Journal of Materials Research and Technology.2026:7212-7223
【一作SCI】Preparation and properties of conductive fixed abrasive polishing discs for electrochemical mechanical polishing of SiC substrates.Materials Science in Semiconductor Processing.2026:110710
【一作SCI】Material removal behavior of SiC wafer studied by nano-scratching in aqueous medium.Diamond and Related Materials.2026:113588
【一作-SCI】Tribochemical mechanisms of abrasives for SiC and sapphire substrates in nanoscale polishing.Nanoscale.2023:15675

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