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NAME
罗求发
Research Field
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Paper Publications
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【一作-SCI】Fabrication and Application of Grinding Wheels with Soft and Hard Composite Structures for Silicon Carbide Substrate Precision Processing.Materials.2024
【一作-EI】碳化硅衬底磨抛加工技术的研究进展与发展趋势.湖南大学学报（自然科学版）.2024
【一作-SCI】Tribochemical mechanisms of abrasives for SiC and sapphire substrates in nanoscale polishing.Nanoscale.2023
【一作-SCI】Sol-gel polishing technology for extremely hard semiconductor substrates.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY.2022
【一作-EI】单层磨料凝胶抛光垫的加工性能研究.表面技术.2021
【一作-SCI】Controllable material removal behavior of 6H-SiC wafer in nanoscale polishing.Applied Surface Science.2021
Patents
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一种用于电化学机械抛光的工具制备方法及抛光工具
一种磨粒放电诱导去除绝缘晶圆表面的磨抛加工方法
一种基于磨粒放电诱导去除半导体晶圆表面的抛光方法
一种用于半导体晶圆表面的磨削方法
一种诱导工件摩擦化学反应的砂轮结块及其制备方法
一种软硬复合结构减薄砂轮的制备方法
Published Books
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Research Projects
国家自然科学基金面上项目（2025.01-2028.12）, 【国家级-主持】
国家自然科学基金青年项目（2021.01-2023.12）, 【国家级-主持】
福建省自然科学基金青年项目（2021.11-2024.11）, 【省部级-主持】
Research Team
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