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磨料与晶圆衬底摩擦化学反应的实现装置及其实现方法

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Affilication of Author(s):制造工程研究院

Disigner of the Invention:LJ,XXP,XZP,JF

Type of Patent:发明专利

State of Patent:专利授权

Application Number:202110378440.0

Service Invention or Not:no

Application Date:2021-04-08

First Author:LQF

Pre One:磨料与晶圆衬底摩擦化学反应的实现装置