Songjie Luo, Yongxin Liu, Osami Sasaki, and Jixiong Pu. “Signal processing in white-light scanning interferometry by Fourier transform and its application to surface profile measurements”, Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230V (24 November 2016).
Date:2026-03-13 clicks:
Translation or Not:no



