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陆静
学位：工学博士学位
职称：教授
所在单位：制造工程研究院
博士生导师
主要任职：
厦门市光电材料加工重点实验室副主任
学历：
博士研究生
学位：
工学博士学位
所在单位：
制造工程研究院
电子邮箱：
43d9546ff93deca1cef1f5ea49e124553b90a6ef29da0a4198b346e7b56872e6b2ef26e06817bd34b15dc94a88a95f72254ce1ea4caf79142a80c53962fcf92a4a5a5e39b79ece9c64da79bc3dbed5a134ba90686bdce65668e62976c905c2f426e1b8a03d682d4e77fe367d769425bd573d02d985870ed1f9a48cdbbf8513c2
其他任职：
国际磨粒加工委员会（ICAT）青年委员，中国机械工程学会生产工程分会光整加工专业委员会理事，稀土抛光材料与界表面调控加工技术专业委员会副主任委员，福建省机械工程学会标准委员会委员
论文成果
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[111]Surface Characterization of Silicon Wafers Polished by Three Different Methods.Key Engineering Materials,2010,
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[112]Effect of Fabrication Conditions on Ultra-fine Abrasive Polishing Pad.Advanced Materials Reseach,2011,
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[113]Study on the Machining Parameters in Polishing Single-crystal SiC Wafers with SG Films.Key Engineering Materials,2012,
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[114]Controllable Fabrication and Characterization of Si-coated Multiwalled Carbon Nanotubes.SCI 四区:INTEGRATED FERROELECTRICS,2012,
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[115]Characteristic study on matrix of nano-sized abrasive polishing tool fabricated by sol-gel technique.中国微米纳米技术学会;天津大学:纳米技术与精密工程,2013,
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[116]Research on Performance of Fixed Abrasive Tools of Polishing 6H-SiC.Advanced Matertials Research,2013,
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[117]Characteristic study on matrix of nano-sized abrasive polishing tool fabricated by sol-gel technique.纳米技术与精密工程,2014,
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[118]Research on Performance of Fixed Abrasive Tools of Polishing 6H-SiC.Advanced Matertials Research,2014,
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[119]The effects of abrasive yeilding on the polishing of SiC wafers using a semi-fixed flexible pad.Proc IMechE Part B J Engineering Manufacture,2014,
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[120]Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,2014,
