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陆静
学位：工学博士学位
职称：教授
所在单位：制造工程研究院
博士生导师
主要任职：
厦门市光电材料加工重点实验室副主任
学历：
博士研究生
学位：
工学博士学位
所在单位：
制造工程研究院
电子邮箱：
43d9546ff93deca1cef1f5ea49e124553b90a6ef29da0a4198b346e7b56872e6b2ef26e06817bd34b15dc94a88a95f72254ce1ea4caf79142a80c53962fcf92a4a5a5e39b79ece9c64da79bc3dbed5a134ba90686bdce65668e62976c905c2f426e1b8a03d682d4e77fe367d769425bd573d02d985870ed1f9a48cdbbf8513c2
其他任职：
国际磨粒加工委员会（ICAT）青年委员，中国机械工程学会生产工程分会光整加工专业委员会理事，稀土抛光材料与界表面调控加工技术专业委员会副主任委员，福建省机械工程学会标准委员会委员
论文成果
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[141]The effects of SiO2 coating on diamond abrasives in sol-gel tool for SiC substrate polishing.DIAMOND AND RELATED MATERIALS,2017,
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[142]Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO2-coated diamond abrasive.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,2017,
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[143]Removal mechanism of sapphire substrates (0001, 1120 and 1010) in mechanical planarization machining.CERAMICS INTERNATIONAL,2017,
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[144]Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP.INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE,2018,
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[145]Fabrication of fixed polishing tool by knitting diamond/CNT fiber threads on cloth.DIAMOND AND RELATED MATERIALS,2018,
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[146]Removal mechanism of 4H-and 6H-SiC substrates (0001 and 0001 over bar ) in mechanical planarization machining.PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE,2019,
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[147]Pollution-Free Approaches for Highly Efficient Sapphire Substrate Processing by Mechanical Chemical Polishing.CATALYSTS,2019,
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[148]Precision Polishing of Single Crystal Diamond (111) Substrates Using a Sol-Gel (SG) Polishing Pad.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,2019,
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[149]Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed.IEEE Transactions on Semiconductor Manufacturing,2022,
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[150]Study on Polishing of Polycrystalline AlN Using Sol-Gel Polishing Tool.IEEE Transactions on Semiconductor Manufacturing,2022,
